发明名称 Image display system and fabrication method thereof
摘要 The invention provides a method for fabricating a low-temperature polysilicon (LTPS) driving circuit and thin film transistor. The method includes: providing a substrate, forming an active layer, forming a gate insulating layer, forming a dielectric layer having an extending portion and forming a gate electrode. The extending portion of the dielectric layer and the gate electrode are formed during the same step, and they can serve as a mask during a later doping process so that a lightly doped source/drain region and a source/drain region are formed during the same time without forming extra masks.
申请公布号 US2009085039(A1) 申请公布日期 2009.04.02
申请号 US20080284581 申请日期 2008.09.22
申请人 TPO DISPLAYS CORP. 发明人 CHUNG MING-YU;TSAI SHAN-HUNG;CHEN SU-FEN;WONG KUAN-SHIANG;CHANG HSIAO-PO;CHIEN JUNG-HUANG;CHEN HSIU-HSIU
分类号 H01L21/336;H01L33/00 主分类号 H01L21/336
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