| 摘要 |
A method of determining the presence of vaporized hydrogen peroxide (VHP) in a region, comprising the steps of providing a sealable region having an inlet port and an outlet port, creating a flow of a carrier gas into, through and out of the region, delivering vaporized hydrogen peroxide into the carrier gas flow upstream of the region inlet port, destroying the vaporized hydrogen peroxide at a first location downstream from the region outlet port, monitoring the temperature of the carrier gas before and after the first location, and determining a presence of vaporized hydrogen peroxide in the region based upon the temperature readings before and after the first location.
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