发明名称 |
METHOD FOR DIMENSION CONVERSION DIFFERENCE PREDICTION, METHOD FOR MANUFACTURING PHOTOMASK, METHOD FOR MANUFACTURING ELECTRONIC COMPONENT, AND PROGRAM FOR DIMENSION CONVERSION DIFFERENCE PREDICTION |
摘要 |
A method for dimension conversion difference prediction includes: determining an opening angle at a conversion difference prediction point on basis of a design pattern data; and predicting a dimension conversion difference on basis of correlation between the opening angle and an actual measurement value of the dimension conversion difference, or a method for dimension conversion difference prediction includes: determining an incident amount of incident objects at a conversion difference prediction point on basis of a design data; and predicting a dimension conversion difference on basis of correlation between the incident amount and an actual measurement value of the dimension conversion difference.
|
申请公布号 |
US2009089727(A1) |
申请公布日期 |
2009.04.02 |
申请号 |
US20080238018 |
申请日期 |
2008.09.25 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
IYANAGI KATSUMI |
分类号 |
G06F17/50;G03F1/36;G03F1/68;G03F1/70;H01L21/027;H01L21/3065 |
主分类号 |
G06F17/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|