WATER-SOLUBLE PROCESSING OIL FOR FREE-ABRASIVE-GRAIN WIRE SAW

摘要

A water-soluble processing oil for free-abrasive-grain wire saws which, when used in cutting a high-hardness brittle material such as silicon, attains high accuracy of processing and high processing efficiency and causes no problems, e.g., foaming. Also provided are: a slurry comprising the oil and free abrasive grains; and a method of cutting a brittle material such as silicon with the oil or the slurry. The water-soluble processing oil for free-abrasive-grain wire saws comprises (A) 5-80 mass% glycerol, (B) 3-60 mass% diethylene glycol and/or propylene glycol, (C) 0.3-20 mass% aromatic polycarboxylic acid salt, (D) 3-30 mass% polyhydric alcohol derivative, and (E) 3-88.7 mass% water. The slurry, which comprises the oil and abrasive grains, is for use in cutting.