摘要 |
The invention relates to optical arrangements by which a radiation field is grouped or split into a multiplicity of beams. In one group of optical arrangements, the radiation field is split sequentially by beam splitters arranged in succession. In the other group of optical arrangements, the radiation field is grouped and split by the edges or corners of arrays of optical components, such as lenses and/or mirrors, in cross section. The beams thus generated are used for parallel applications such as drilling, cutting, eroding, coating removal and structuring.
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