| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning solution with which a resist can be removed without corroding aluminum. SOLUTION: A cleaning solution comprising a combination of components including a basic substance such as caustic soda, an alkaline earth metal salt such as calcium chloride, polyacrylic acids and water can be used without corroding aluminum, and further without causing deposition as precipitate of a hydroxide of the alkaline earth metal salt that prevents corrosion of aluminum. If necessary, an alcohol-based, ether-based, amide-based, sulfur-containing, imidazolidinone-based or lactone-based water-soluble organic solvent can be used. Preferably, the basic substance ranges from 0.01 to 20 wt.%, the alkaline earth metal salt ranges from 0.001 to 5 wt.%, the polyacrylate ranges from 0.001 to 5 wt.%, water ranges from 50 to 99.99 wt.% and the water-soluble organic solvent ranges not more than 50 wt.% per the whole cleaning solution. COPYRIGHT: (C)2009,JPO&INPIT |
