| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for obtaining alloy particles which stably carry particulate elements with particle sizes of 2 to 10 nm on the surface of a particulate base material such as carbon. <P>SOLUTION: The apparatus for making fine alloy particles carried includes: a container which accommodates the particulate base material; a first sputtering source which is arranged so as to face the container, includes platinum and has a rectangular shape; a second sputtering source which is arranged adjacent to the first sputtering source and includes an element different from that included in the first sputtering source; a first magnet which is arranged at a side of the first sputtering source opposite to a side of facing to the container; and a second magnet which is arranged at a side of the second sputtering source opposite to a side of facing to the container. The magnetic flux density of a magnetic field in the vicinity of the surface of the first or the second sputtering source is varied by adjusting a distance between the first or the second sputtering source and the first or the second magnet corresponding to the respective sources, or a magnetic force of the first or the second magnet. <P>COPYRIGHT: (C)2009,JPO&INPIT |
