发明名称 METHOD OF MANUFACTURING SOLID-STATE IMAGING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a solid-state imaging element which can eliminate misalignment between a front surface side and a rear surface side and is accurate and reduced in cost through the reduced number of processes. SOLUTION: A support substrate 19 that is formed of a highly optical transparent material in a visible light region is bonded onto the front surface side of a semiconductor substrate 10 wherein an alignment mark 11 is formed on its front surface side, with an adhesive agent 18 formed of a highly optical transparent material in the same visible light region. When a component is formed on the rear surface side, the alignment mark 11 formed on the front surface side is recognized by a recognition device 12A for alignment. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009071187(A) 申请公布日期 2009.04.02
申请号 JP20070240008 申请日期 2007.09.14
申请人 FUJIFILM CORP 发明人 SUZUKI HISASHI
分类号 H01L27/14;H01L27/148;H04N5/335;H04N5/369;H04N5/372;H04N5/374 主分类号 H01L27/14
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