| 摘要 |
PROBLEM TO BE SOLVED: To specify a defective point on a short line defect, in a TFT array inspection. SOLUTION: A TFT substrate inspection method inspects defects of a TFT array, by applying a voltage on the TFT array of a TFT substrate and detecting secondary electrons obtained by electron beam irradiation. The inspection method includes a line defect detection process for detecting the presence of line defects by applying a first inspection signal on the TFT substrate; a defective point detection process for detecting presence of a defective point, by applying a second inspection signal having a signal pattern different from the first inspection signal on the TFT substrate; a defective point extraction process for comparing the position of the line defect and the position of the defective point, and extracting the defective point on the line defect, as a defective point of the short-line defect. By changing the signal pattern of the inspection signal applied to the TFT substrate, line defect detection and defective point detection can be conducted through switching. It is determined whether the defect position detected by the defective point detection is located inside a detection position detected in the line defect detection by comparing positional coordinates. COPYRIGHT: (C)2009,JPO&INPIT
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