APPARATUS AND METHOD FOR BREAKING SUBSTRATE MADE OF BRITTLE MATERIAL

摘要

PROBLEM TO BE SOLVED: To stably form perpendicular cracks of different desired depths without changing the type of a cutter wheel. SOLUTION: The depth of the perpendicular crack 132 from a scribe line 131 is controlled by a condition for scribing by forming the scribe line 131 by pressing and rolling the cutter wheel 19 against and on the surface of a glass substrate 13 and applying a laser to the surface of the glass substrate 13 at a position behind the cutter wheel 19 in its rolling direction and at a prescribed distance from the cutter wheel 19 and a condition for scribing by forming the scribe line 131 by pressing and rolling the cutter wheel 19 against and on the surface of the glass substrate 13. Spraying of a cooling fluid onto a cooling area including the scribe line 131 by a discharge nozzle 21 (cooling means) located between the cutter wheel 19 and a laser irradiating part 18 (laser irradiating means) or at downstream of the laser irradiating part 18 can be added to the conditions for controlling the depth of the perpendicular crack 132. COPYRIGHT: (C)2009,JPO&INPIT