| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro ion source device and an integrated micro ion source device excellent in economic efficiency enabling to carry out different processes with the same vacuum device at the same time, by cutting off unnecessary power for driving an ion source through use of a micro ion source, and capable of carrying out manufacturing of a large variety of small-scale MEMS products simply and at low cost. SOLUTION: Either or both of two opposed cathode electrodes 6, 7 have mesh holes for ion draw-out on silicon substrates 1, 3. An anode electrode 8 is arranged at a middle part of the cathode electrodes 6, 7, and is equipped with a silicon substrate 2 with an opening at the center part. Insulating Pyrex glass substrates 4, 5 insulate the cathode electrodes 6, 7 from the anode electrode 8. COPYRIGHT: (C)2009,JPO&INPIT
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