| 摘要 |
PROBLEM TO BE SOLVED: To provide a paste coater intended to improve the rapidity and reliability of the attachment and detachment of a maintenance member and retain cleanliness, and a method of attaching/detaching a maintenance member. SOLUTION: The controller 182 in the coating unit 20 controls the operations of a substrate stage 116, a stocker raising/lowering mechanism 124 and clampers 119-1 and 119-2, resulting in an up/down movement of the stocker 122, a movement of the substrate stage 116 in such a direction as to approach or separate from the stocker 122 and an opening/closing operation by the clampers 119-1 and 119-2. By the operations, two or more used maintenance members 150 attached to the substrate stage 116 are removed and mounted on an empty mounting stage 130 in the stocker 122, and unused maintenance members 150 mounted on the mounting stage 130 are taken out and attached to the substrate stage 116. COPYRIGHT: (C)2009,JPO&INPIT
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