| 摘要 |
A method of forming polysilicon thin film material for photovoltaic devices. The method includes providing a polycrystalline silicon substrate. The polycrystalline silicon substrate includes a surface region, a backside region, and a thickness. In a specific embodiment, the method forms a polysilicon thin film material using a deposition process overlying the surface region of the polycrystalline silicon substrate. The polysilicon thin film material is characterized by a grain size greater than about 0.1 mm.
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