VAPORIZER AND FILM FORMING APPARATUS

摘要

Clogging due to having a liquid material not vaporized is eliminated by uniformizing temperature of a ventilating member as a whole, at the time of making a liquid material droplet vaporize through the ventilating member. The vaporizer is provided with an inlet (354) for introducing the liquid material droplet; a board-like ventilating member (410) arranged to face the inlet and composed of a member, which generates heat when electricity is carried and has electrical resistance; a pair of electrodes (420, 430) arranged to face each other by sandwiching the ventilating member; an alternating current power supply (380) which carries electricity to the ventilating member through the pair of electrodes and makes the ventilating member generate heat; and an outlet (132) for sending to the outside a material gas generated by passing the liquid material droplet from the inlet through the inside of the ventilating member which generated heat.