| 摘要 |
PROBLEM TO BE SOLVED: To provide electron beam irradiation equipment which improves the workability in the replacement of electron generating members of an electron beam source and also to reduce the space required for the electron beam irradiation equipment including replacement work. SOLUTION: The electron beam irradiation equipment 1A includes an accommodation section 2 and the electron beam source 3. The accommodation section 2 has a main body 22 and a lid 24 mounted on the section 2 so that the lid 24 can be opened and closed and stores an object A to be irradiated in an electron beam irradiation chamber 21. The electron beam source 3 has a vacuum container 13, which includes a base end 14 and a point end 15. The point end 15 is fixed onto the lid 24. An irradiation window section 12 which is so constituted that it can be attached to and detached from the side of the electron beam irradiation chamber 21 is mounted on the point end 15. A door 25 for carrying in and out the object A to be irradiated is installed at the front of the main body 22. The vacuum container 13 can be opened and closed by using a hinge 18 placed on the back side as a supporting point. The lid 24 can be opened and closed by using a hinge 23 placed on the back side as a supporting point. COPYRIGHT: (C)2009,JPO&INPIT
|
