| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure the inner state of a measuring target without being affected by the inner temperature distribution or thickness of the measuring target. SOLUTION: An inner state measuring instrument includes an ultrasonic transmitting and receiving device 120 for transmitting an ultrasonic wave of each frequency in a predetermined frequency region to the measuring target 200, a resonance frequency detection part 132 for detecting a plurality of the resonance frequencies in the measuring target 200 on the basis of the ultrasonic wave of each frequency propagated through the measuring target 200, a frequency interval calculation part 133 for respectively calculating the frequency interval between two resonance frequencies of a plurality of the resonance frequencies detected by the resonance frequency detection part 132, a variation quantity calculation part 134 for calculating the variation quantity of the frequency interval calculated in the frequency interval calculation part 133 and an inner state decision part 136 for deciding the inner state of the measuring target 200 on the basis of the variation quantity calculated by the variation quantity calculation part 134. COPYRIGHT: (C)2009,JPO&INPIT
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