| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric ink jet head that has a high performance actuator. SOLUTION: A substrate and a passage formation member are integrated by a conductive layer. A portion for forming a liquid chamber by anodization is made porous. After a vibrating plate and an actuator are formed on this portion, a nozzle portion is cut, and the porous portion is etched. Thereby a head is formed. COPYRIGHT: (C)2009,JPO&INPIT
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