| 摘要 |
The sensor has a pair of electrodes (1, 2) movably supported relative to a third electrode, where the pair of electrodes are arranged spatial to the third electrode and are swivelable about a rotation axis (3). A set of spring elements produces a resetting force during deflection of the pair of electrodes from a rest position, where frequencies of natural oscillations of the pair of electrodes differ. Each electrode has a carrier substrate and a conductive coating, where the coating is implemented as partial coating. The electrodes have a lateral structure. An independent claim is also included for a method for measuring acceleration. |
