发明名称 Wafer and method for producing a wafer
摘要 <p>A wafer includes a wafer frontside surface and a region adjacent to the wafer frontside surface. The region includes oxygen precipitates and the wafer frontside includes a predetermined surface structure to form thereon a device with a desired property.</p>
申请公布号 EP2043137(A2) 申请公布日期 2009.04.01
申请号 EP20080014918 申请日期 2008.08.22
申请人 INFINEON TECHNOLOGIES AG 发明人 SCHULZE, HANS-JOACHIM;STRACK, HELMUT;TIMME, HANS-JOERG
分类号 H01L21/265;H01L21/322;H01L41/083 主分类号 H01L21/265
代理机构 代理人
主权项
地址