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发明名称
喷嘴清洗装置及清洗方式
摘要
本发明提供一种喷嘴清洗装置及清洗方法。上述喷嘴清洗装置包含:一对清洗块,其长度与狭缝喷嘴宽度相应,并以狭缝喷嘴为中心对向配置;以及,移动构件,使上述对向配置之一对清洗块沿相互接触或分离之方向前移或后移。由于上述构成,因此不仅可以发挥对于向基板喷出药液之狭缝喷嘴的清洗功能,同时,于长期不使用狭缝喷嘴时,亦可发挥防止狭缝喷嘴之喷出口暴露于外部空气中之密封部件的作用。
申请公布号
TW200914155
申请公布日期
2009.04.01
申请号
TW097130366
申请日期
2008.08.08
申请人
K C 科技股份有限公司
发明人
赵康一
分类号
B08B3/00(2006.01);H01L21/30(2006.01)
主分类号
B08B3/00(2006.01)
代理机构
代理人
陈长文
主权项
地址
南韩
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