| 摘要 |
The present invention relates to a box cleaner (C) including an ultrasonic cleaning bath having a receiving space (101) to be filled with DIW and an ultrasonic wave generator (105) arranged at a bottom thereof; a tray (102) for loading a wafer shipping box (10) thereon; a lift (103,104) for providing a driving force to put the tray into the ultrasonic cleaning bath and take the tray out of the ultrasonic cleaning bath; and a drying system (200) for drying the cleaned shipping box, wherein a gas sprayer (106) is installed in the ultrasonic cleaning bath for spraying gas into the cleaned shipping box to push the DIW out of the shipping box, thereby draining the DIW. |
