| 摘要 |
<p>[PROBLEMS] To provide a two-sided surface grinding apparatus capable of eliminating undulations of concentric circles produced in the work surfaces by grinding, thereby further improving the degree of flatness of the work surfaces after grinding. [MEANS FOR SOLVING PROBLEMS] A pair of support pads 43a which hold work outwardly of grinding whetstones and noncontactly support the work by the pressure of fluid are formed with notches 44 corresponding to the grinding whetstones and extending from the outer edge to the center, and their noncontact support surfaces 45 are provided with a plurality of pockets 51 having fluid supply holes 62, and a mesh section 52 forming banks around the peripheries of these pockets 51, the mesh section 52 being composed of a peripheral edge 53 disposed along the outer periphery of the noncontact support surface 45, and inside veins 54 disposed so as to divide the inside of the peripheral edges 53 and connected to the inside-and-outside connecting sections 52a The portion of the peripheral edge 53 which extends along the notch 44 is not provided with any inside-and-outside connecting section 52a in the region excluding at least the vicinity of the central position A' of the work W.</p> |
