| 摘要 |
A planar lightwave circuit, a manufacturing method thereof, and an optical waveguide device are provided to improve optical coupling efficiency of the planar lightwave circuit by coupling an optical element in the light waveguide unit without a gap. A PLC(Printed Lightwave Circuit)(11) includes a light waveguide pipe(20) and an optical element mounting unit(90). In an optical waveguide unit, an under clad layer(21), a core layer(24) and an upper clad layer(22) are formed in a silicon substrate. The optical element mounting unit has an LD(Laser Diode)(72). The LD is optically coupled with a cross section(27) of a light waveguide tube. The LD is loaded in the silicon substrate.
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