A MICRO HEATER AND MANUFACTURING METHOD OF THE SAME

摘要

A micro heater and a manufacturing method thereof are provided to lower the power consumption by maximizing the thermal isolation effect, and to use the micro heater as the excellent infrared light source. A micro heater comprises a heater wiring(130) which is separated from substrate, an electrode pad(140) which authorizes the voltage in the bi end of the heater wiring, and a support pillar(150) which supports the heater wiring. The heater wiring includes an insulating layer which electrically insulates substrate and heater wiring; and a metal layer which is evaporated on the insulating layer and flows current.