发明名称 COMPOSITION FOR STRIPPING AND STRIPPING METHOD
摘要 A stripping composition and a stripping method using the same are provided to prevent the damage of the thin film transistor when removing color resist or organic insulating film. A stripping composition comprises a hydroxide-based compound 0.5-45 weight%, alkylene glycol alkyl ether-based compound 10-89 weight%, an alkanolamine-based compound 5-45 weight% and inorganic salt compound 0.01-5 weight%. The hydroxide-based compound has C1-4 alkyl group. The alkylene glycol alkyl ether-based compound has C1-4 alkyl group.
申请公布号 KR20090032640(A) 申请公布日期 2009.04.01
申请号 KR20070098028 申请日期 2007.09.28
申请人 SAMSUNG ELECTRONICS CO., LTD.;DONGJIN SEMICHEM CO., LTD. 发明人 LEE, JI SUN;PARK, HONG SICK;CHOUNG, JONG HYUN;HONG, SUN YOUNG;KIM, BONG KYUN;LEE, BYEONG JIN;KIM, BYUNG UK;JEONG, JONG HYUN;YOON, SUK IL;KIM, SEONG BAE;SHIN, SUNG GUN;HUH, SOON BEOM;JUNG, SE HWAN;JANG, DOO YOUNG
分类号 G03F7/34 主分类号 G03F7/34
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