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发明名称
操作微影工具之方法
摘要
在一种操作一微影工具之方法中,氢气被供应至一容纳该工具之腔室。添加一定量之氩气至该腔室或至从该腔室所排出的气体以增加从该腔室抽取气体的速度。选择该氩气之量,使得(i)该腔室内之该气体的崩溃电压不小于无该氩气添加之该腔室内之气体之崩溃电压的0.75倍,及/或(ii)穿过该腔室内之气体之EUV辐射透射为无该氩气添加之该腔室内之该气体之EUV辐射透射之至少95%。
申请公布号
TW200915009
申请公布日期
2009.04.01
申请号
TW097118170
申请日期
2008.05.16
申请人
爱德华有限公司
发明人
卡洛琳 休葛斯;安东尼 肯恩
分类号
G03F7/20(2006.01)
主分类号
G03F7/20(2006.01)
代理机构
代理人
陈长文
主权项
地址
英国
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