| 摘要 |
An apparatus for cleaning a substrate is provided to prevent a counter-rotating or an operation stop of a blower by a flowing backward of an air. An apparatus for cleaning a substrate comprises a cleaning processing unit, a blowing member, and a blocking member(566). The cleaning processing unit cleans a substrate. The blowing member forms a descending air current, and supplies an air to the cleaning processing unit. The blocking member blocks a flow of an air flowing backward to the blowing member. The blowing member includes a fan housing(564), a fan(563), and a main housing(562). A top and a bottom of the fan housing are opened. The fan is installed in an inner side of the fan housing. The fan and the fan housing are mounted in the main housing.
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