| 发明名称 |
Immersion lithographic apparatus and method of detecting contamination |
| 摘要 |
A method of operating a fluid confinement system (12) of an immersion lithographic apparatus is disclosed. The performance of the liquid confinement system is measured in several different ways. On the basis of the result of the measurement of performance, a signal indicating, for example, that a remedial action may need to be taken is generated. |
| 申请公布号 |
EP2042930(A2) |
申请公布日期 |
2009.04.01 |
| 申请号 |
EP20080253055 |
申请日期 |
2008.09.17 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
STREEFKERK, BOB;DE GRAAF, ROELOF FREDERIK;MULKENS, JOHANNES CATHARINUS HUBERTUS;BECKERS, MARCEL;BERKVENS, PAUL PETRUS JOANNES;ANSTOTZ, DAVID LUCIEN |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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