SINGLE CRYSTAL NANO-STRUCTURES MANUFACTURING METHOD CAPABLE OF THE SYNTHESIS OF MORPHOLOGY CONTROLLED AND DEVICE THEREOF

摘要

An apparatus for manufacturing monocrystal nanostructure under the condition of low temperature within a short time is provided to realize miniaturization of various devices using specific electrical and physical properties shown in nano-sized metal or semiconductor. An apparatus for manufacturing monocrystal nanostructure comprises: a main chamber(100) connected to a vacuum unit(106); a base(138) wherein a target member and a heating unit are arranged(20); a holder(122), installed at some distance from the base, fixing a substrate to have a predetermined distance from the target member; a displacement unit adjusting an interval between the target member and the substrate by vertically displacing the holder; a cooling unit cooling the substrate; and a pulse voltage feeding unit applying pulse voltage to the target member.