| 摘要 |
Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material (23) over at least a portion of a transparent substrate (20), depositing a dielectric layer (24) over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer (24) on the sacrificial layer, and forming a cavity (19) by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer. |
