Methods of fabricating mems with a shaped substrate and devices formed by same

摘要

Methods of fabricating interferometric modulators having black masks and devices formed by the same are disclosed. In one embodiment, interferometric modulators are fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. The front substrate is also provided with black masks to prevent or mitigate bright areas in the actuated state of the resulting interferometric modulators. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier of some embodiments is released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the MEMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. The methods not only reduce the manufacturing costs, but also provide a higher yield. The resulting interferometric modulators can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.