发明名称 |
FLUID DELIVERY RING AND METHODS FOR MAKING AND IMPLEMENTING THE SAME |
摘要 |
<p>A fluid delivery module for use in preparing a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.</p> |
申请公布号 |
EP1320871(B1) |
申请公布日期 |
2009.04.01 |
申请号 |
EP20010968917 |
申请日期 |
2001.09.12 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
SMITH, STEPHEN, M.;TREUR, RANDOLPH, E. |
分类号 |
H01L21/00;H01L21/304 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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