THE METHOD TO FABRICATE FREE-STANDING METALLIC MICROMECHANICAL STRUCTURE WITH METAL THIN FILM FORMED ON CNTNT AND STRUCTURE OF THEREOF

摘要

A method for fabricating a free-standing metallic micromechanical structure with a metal thin film formed on CNTnt(carbon nanotube network template) is provided to maintain high basic resonance frequency about a geometric structure given by dynamic bending measurement and notify a bifurcation sign about Al/CNTnt. A method for fabricating a free-standing metallic micromechanical structure with a metal thin film formed on CNTnt(carbon nanotube network template) comprises the following steps: forming CNTnt on a semiconductor board; forming a pattern having a double-beam shape on the CNTnt; depositing metallic foil on the CNTnt; exfoliating the metallic foil from the CNTnt; forming suspended doubly-clamped beams; and forming an counter electrode through a metal deposition process. The semiconductor board represents a GaAs board. The CNTnt is characterized by being formed through CNTnt self assembly.