| 摘要 |
A slit coater is provided to prevent the instability of atmosphere due to the movement of a slit nozzle by proceeding the leaking preventive work of drug solution by moving a drug solution filling device at fixed state. A slit coater comprises a work table(2), a movable part(4) moving a substrate(G) on the work table, a slit nozzle(10) in which a chamber is formed in order to fill drug solution inside, equipped in one side of the work table in order to move up and down; a drug filling device(14) preventing drug solution from being escaped by applying pressure on a vent; and a movable tool moving the drug filling device, arranged on the work table. The movable tool consists of a movable stage elevating the substrate using air pressure; and a chuck(C) movably mounted to the work table, equipped in the movable stage and supporting the substrate.
|
