发明名称 ELECTROSTATIC ACTUATOR FORMED BY A SEMICONDUCTOR MANUFACTURING PROCESS
摘要 <p>An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics.</p>
申请公布号 EP1534525(B1) 申请公布日期 2009.04.01
申请号 EP20030766746 申请日期 2003.08.05
申请人 RICOH COMPANY, LTD. 发明人 NISHIMURA, MANABU;KURODA, TAKAHIKO;ABE, SHUYA;TANAKA, MAKOTO;IRINODA, MITSUGU;HASHIMOTO, KENICHIROH
分类号 B41J2/045;B41J2/055;B41J2/14;B41J2/16 主分类号 B41J2/045
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