| 摘要 |
A method of supporting a wafer and a wafer chuck for performing the same are provided to prevent the defocus by supporting the wafer horizontally. A wafer chuck comprises a wafer support unit(135) and a base(140). A wafer(200) is supported by the wafer support unit. The wafer support unit comprises a pin(110), a pin receiving part(120), and an air supply pipe(130). The pin is adopted to the pin receiving part. The pin supports the lower surface of wafer. The pin receiving part ascends and descends the pin. The air supply pipe is connected to the pin receiving part in order to supply the air. The base accommodates the wafer support unit. The wafer is loaded in the wafer support unit.
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