PHOTOCATHODE LIGHTING DEVICE, METHOD FOR MANUFACTURING THE SAME AND EXPOSURE APPARATUS USING PHOTOCATHODE LIGHTING DEVICE

摘要

The photocathode lighting device of planar light emission including: a light source unit emitting a first light; a cathode plate contacted face-to-face with the light source unit; a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures; a photocathode formed on a surface of the metal mask layer, receiving the first light, and emitting an electron; an anode plate facing the cathode plate and spaced apart from the cathode plate; and a phosphor formed in a lower part of the anode plate and emitting a second light when the emitted electron collides with the phosphor.