| 摘要 |
A vertical array of flash memory cells. Transistor bodies are disposed on a substrate, comprising a source, channel and drain region, stacked thereon. Two joint gate structures are disposed on opposite sidewalls of every two transistor bodies respectively, and include a joint tunnel oxide layer disposed conformally on sidewalls of the two transistor bodies and the substrate there between, two floating gates on the opposite sidewalls of the tunnel oxide layer, a joint insulating layer covering the floating gates and the substrate there between, and a joint control gate layer on the sidewalls of the transistor bodies and the substrate there between. A dielectric layer covers the transistor bodies, where bit lines and word lines are disposed therein in contact with the top surfaces of the transistor bodies and the control gates between every two transistor bodies respectively. Source lines are disposed in the substrate to contact the source regions.
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