SYSTEM FOR REDUCING OXIDATION OF ELECTRONIC DEVICES

摘要

THE INVENTION PROVIDES A SYSTEM FOR REDUCING OXIDATION OF A SEMICONDUCTOR DEVICE WHEN IT IS HEATED, FOR EXAMPLE DURING WIRE BONDING. A HOLDING DEVICE IS PROVIDED FOR SECURING THE SEMICONDUCTOR DEVICE TO A PLATFORM. THE HOLDING DEVICE INCLUDES AN OPENING FOR PROVIDING ACCESS TO AN AREA WHERE THE SEMICONDUCTOR DEVICE IS TO BE HEATED AND A CAVITY IS COUPLED TO THE OPENING. A GAS INLET IN FLUID COMMUNICATION WITH THE CAVITY SUPPLIES A RELATIVELY INERT GAS TO THE CAVITY, WHEREBY TO TRANSMIT THE INERT GAS TO THE OPENING THROUGH THE CAVITY AND TO REDUCE OXIDATION OF THE SEMICONDUCTOR DEVICE.