| 摘要 |
A WAFER CARRIER DOOR HAVING AN INNER DOOR PORTION AND AN OUTER DOOR PORTION. THE INNER DOOR PORTION HAS A SUBSTANTIALLY CONTINUOUS INNER SURFACE. THE OUTER DOOR PORTION EXTENDS OVER AT LEAST A PORTION OF THE INNER DOOR PORTION. THE OUTER DOOR PORTION HAS A PLURALITY OF APERTURES FORMED THEREIN. THE OUTER DOOR PORTION IS ATTACHED TO THE INNER DOOR PORTION.
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