发明名称 Bridge for semiconductor internal node
摘要 A method and apparatus for forming connections within a semiconductor device is disclosed. The semiconductor device incorporates a contact bridge between transistor contacts in close proximity. The contact bridge comprises a plurality of metal pillars each having a lower end in electrical contact with first and second transistor elements, respectively; one or more intermediate metal pillars disposed between and in electrical contact with an upper end of the metal pillars; and one or more separation regions of dielectric disposed below the intermediate metal pillar and between the lower ends of the first and second metal pillars.
申请公布号 US7510960(B2) 申请公布日期 2009.03.31
申请号 US20060468102 申请日期 2006.08.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 TOOMEY JAMES J.
分类号 H01L21/4763 主分类号 H01L21/4763
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