发明名称 |
Electrostatic chuck and method of its manufacture |
摘要 |
An electrostatic chuck structure for holding an article is presented. The chuck structure comprises an electrically insulating chuck body layer having a first flat surface for holding the article thereon, and a second opposite surface having a honeycombed pattern in the form of an array of spaced-apart grooves. This second patterned surface of the chuck body surface for depositing thereon an electrically conductive layer (electrodes). A dielectric spacer between the electrodes and the article on the chuck body layer is defined by a portion of the chuck body layer between the grooves' bottom and the flat surface.
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申请公布号 |
US7511935(B2) |
申请公布日期 |
2009.03.31 |
申请号 |
US20060363965 |
申请日期 |
2006.02.27 |
申请人 |
APPLIED MATERIALS, ISRAEL, LTD. |
发明人 |
NAKASH SHMULIK |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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