| 摘要 |
<p>A lithographic apparatus having a Lorentz actuator with a composite carrier is provided to prevent the performance loss of actuator by using the Lorentz actuator having the complex carrier. The actuator generates the power to the first direction. The actuator comprises the first magnetic device(1), and the second magnetic device(11) and the coil. The coil has two sides (21a,21b). The space is formed between the first and second magnetic devices is formed in the second direction vertical to the first direction. The coil is arranged in the space. The first and second magnetic devices are mounted on the working table or the support structure. The substrate table or the support structure is driven by the actuator.</p> |
