发明名称 |
MEGASONIC CLEANING SYSTEM |
摘要 |
<p>MEGASONIC CLEANING SYSTEM A system for cleaning semiconductor packages is provided which comprises a pickhead that is configured to hold the semiconductor packages in an array arrangement and a plurality of nozzles, each of which is constructed and arranged to project a separate jet of cleaning fluid upwardly against the semiconductor packages. A megasonic energy generator is coupled for imparting megasonic energy to the cleaning fluid and a driving device drives relative movement between the plurality of nozzles and the pickhead to direct the said jets to clean the array of packages on the pickhead.</p> |
申请公布号 |
SG150439(A1) |
申请公布日期 |
2009.03.30 |
申请号 |
SG20080055535 |
申请日期 |
2008.07.25 |
申请人 |
ASM ASSEMBLY AUTOMATION LTD |
发明人 |
WAH CHENG CHI;TSE WANG LUNG, ALAN;CHAN LEUNG POR, BORIS |
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