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发明名称
PROCEDE DE DEPOT D'UNE COUCHE POLYMERE SUR UNE FACE D'UN SUPPORT, COMPORTANT AU MOINS UNE ZONE EN CREUX.
摘要
申请公布号
FR2911720(B1)
申请公布日期
2009.03.27
申请号
FR20070000450
申请日期
2007.01.23
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE INDUSTRIEL ET COMMERCIAL
发明人
PUGET CHRISTIANE;HENRY DAVID
分类号
H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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