| 摘要 |
PROBLEM TO BE SOLVED: To provide a monitoring system of a valve apparatus capable of remotely monitoring a dynamic load applied on the valve apparatus with precision. SOLUTION: The monitoring system is configured so as to provide on any one of a valve rod 10, a valve yoke 9, a torque spring 28 and a shaft of the valve apparatus a semiconductor substrate 2 which includes a bridge circuit composed of a plurality of impurity diffused resistors and to determine thrust force and torque from measurement values of the bridge circuit and to be available for monitoring the valve apparatus. COPYRIGHT: (C)2009,JPO&INPIT
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