ORGANIC EL DISPLAY PANEL MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent deposition of an organic material film into a vacuum-deposition chamber. SOLUTION: An organic EL display panel manufacturing apparatus deposits an organic material generated from a deposition source 8 inside the vacuum-deposition chamber 9 onto a substrate 3 used for an organic EL display panel. The EL display panel manufacturing apparatus has a substrate tray 1 for retaining the substrate 3, and a deposition-preventing member 2 protruded on the side of the deposition source in the substrate tray 1. A deposition to vacuum-deposition chamber is remarkably reduced in manufacturing the organic EL display panel. COPYRIGHT: (C)2009,JPO&INPIT