| 发明名称 |
Method and Apparatus for Spacer-Optimization (S-O) |
| 摘要 |
The invention can provide a method of processing a substrate using S-O processing sequences and evaluation libraries that can include one or more optimized spacer creation and evaluation procedures.
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| 申请公布号 |
US2009081815(A1) |
申请公布日期 |
2009.03.26 |
| 申请号 |
US20070859507 |
申请日期 |
2007.09.21 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
YAMASHITA ASAO;FUNK MERRITT;PRAGER DANIEL J.;CHEN LEE;SUNDARARAJAN RADHA |
| 分类号 |
H01L21/311 |
主分类号 |
H01L21/311 |
| 代理机构 |
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代理人 |
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| 主权项 |
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