| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid crystal device capable of attaining display of high quality while enhancing humidity resistance. SOLUTION: The manufacturing method of the liquid crystal device having a liquid crystal between a pair of substrates includes an inorganic alignment layer forming step for forming an inorganic alignment layer on at least one of the pair of substrates, a surface modification treatment step for modifying the surface of the inorganic alignment layer into hydrophobicity by using a silane coupling agent and an ashing step for removing the silane coupling agent on the inorganic alignment layer by using a reactive gas. COPYRIGHT: (C)2009,JPO&INPIT
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