ALL SOLID THIN FILM BATTERY, ITS MANUFACTURING METHOD, AND ITS MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an all solid thin film battery reduced in internal resistance, its manufacturing method, and its manufacturing apparatus.

SOLUTION: The manufacturing method of the all solid thin film battery has a process to form a positive electrode layer 2 by a gas-phase process, a process to form a solid electrolyte layer 3 by a gas-phase process, and a process to form a negative electrode layer 4 by a gas-phase process. While driving a base material 1 in a constant direction in a vacuum ambient atmosphere, the respective gas-phase processes are applied continuously at the respective constant positions, and the positive and negative electrode layers and the solid electrolyte layer are formed on the base material.

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